Publication | Closed Access
Structure and properties of Al2O3 thin films deposited by ALD process
70
Citations
23
References
2016
Year
Materials ScienceMaterials EngineeringAluminium NitrideAld ProcessEngineeringSurface ScienceApplied PhysicsAl2o3 Thin FilmsThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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