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Thermal Conductivity and Interfacial Thermal Resistance: Measurements of Thermally Oxidized SiO2 Films on a Silicon Wafer Using a Thermo-Reflectance Technique

Materials ScienceEngineeringSurface ScienceApplied PhysicsSilicon WaferThermo-reflectance TechniqueThermal TransportThermal ConductionSilicon On InsulatorThermal EngineeringThermal ConductivityThermal Property