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Full-atomistic nanoscale modeling of the ion beam sputtering deposition of SiO2 thin films

Materials ScienceEngineeringPhysicsNanotechnologySurface ScienceApplied PhysicsIon BeamChemical Vapor DepositionThin FilmsChemical DepositionMicroelectronicsFull-atomistic Nanoscale ModelingSilicon On InsulatorThin Film ProcessingSio2 Thin Films