Texture Analysis of Thin Films and Surface Layers by Low Incidence Angle X-ray Diffraction

Abstract

It is necessary to know the orientation of thin surface layers for the electronic industry as well as for different studies on interphases (epitaxy, topotaxy, phase transformation, reactivity of solids). It is difficult to obtain information with a conventional Schulz goniometer (Bragg-Brentano geometry) because of the insufficient amount of diffracting material.