Precise milling of nano-gap chains in graphene with a focused helium ion beam

Abstract

A focused helium ion beam was used to introduce nano-sized gap chains in graphene. The effect of beam scanning strategies in the fabrication of the nano-gap chains was investigated. The tuning of graphene conductivity has been achieved by modulating the magnitude and uniformity of the ion dose and hence the morphology of the nano-gap chains. A model based on the site-specific and dose-dependent conductivity was built to understand the tuning of the conductivity, taking into account the nanoscale non-uniformity of irradiation.