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Gas barrier property of silica-based films on PET synthesized by atmospheric pressure plasma enhanced CVD

Materials ScienceChemical EngineeringEngineeringNonthermal PlasmaSurface ScienceApplied PhysicsAtmospheric Pressure PlasmaVacuum DeviceThin FilmsSilica-based FilmsGas Discharge PlasmaPlasma ProcessingChemical Vapor DepositionGas Barrier Property