Thermal properties of some organosilicon precursors for chemical vapor deposition

Е. N. Ermakova, R. E. Nikolaev, L. D. Nikulina, A. V. Lis, I. P. Tsyrendorzhieva, Pavel E. Plyusnin, M. L. Kosinova

Journal of Thermal Analysis and Calorimetry · 2016 · 12 citations · 32 references

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