Interfacial reaction control and its mechanism of AlN epitaxial films grown on Si(111) substrates by pulsed laser deposition - Concepedia

Concepedia

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Interfacial reaction control and its mechanism of AlN epitaxial films grown on Si(111) substrates by pulsed laser deposition

DOI Full Paper Access

41

Citations

36

References

2015

Year

Wenliang Wang, Weijia Yang, Zuolian Liu, Haiyan Wang, Wen Lei, Guoqiang Li

Scientific Reports

References

	Year	Citations

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