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Thin Films Deposition from Hexamethyldisiloxane and Hexamethyldisilazane under Dielectric-Barrier Discharge (DBD) Conditions

DOI

85

Citations

6

References

2000

Year

K. Schmidt‐Szałowski, Z. Rżanek-Boroch, J. Sentek, Z. Rymuza, Z. Kusznierewicz, M. Misiak
Plasmas and Polymers

References

YearCitations

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