Optimum imaging parameters for elemental mapping in an energy filtering transmission electron microscope

Abstract

The formation of elemental maps in an electron microscope with an imaging energy filter is discused quantitatively. The chemical information is obtained by use of inner-shell excitations. As the relevant cros-sections are very small, the detection and resolution limits are governed by the signal-to-noise ratio. Imaging parameters yielding optimum signal-to-noise ratio are calculated