Publication | Closed Access
Effects of e-beam deposited gate dielectric layers with atmospheric pressure plasma treatment for IGZO thin-film transistors
15
Citations
23
References
2016
Year
Igzo Thin-film TransistorsElectrical EngineeringSemiconductor DeviceEngineeringElectronic EngineeringApplied PhysicsGate Dielectric LayersThin Film ProcessingElectrical Insulation
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