Concepedia

Publication | Open Access

Reduction of residual stress in AlN thin films synthesized by magnetron sputtering technique

DOIFull Paper Access

46

Citations

34

References

2017

Year

Padmalochan Panda, R. Ramaseshan, N. Ravi, G. Mangamma, Feby Jose, S. Dash, Kazuhiro Suzuki, Hisayuki Suematsu
Materials Chemistry and Physics

References

YearCitations

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