Piezoelectrics and Acoustooptics · 2006 · 13 citations · 0 references
EngineeringMechanical EngineeringMechanical DesignStage DesignStructural AnalysisDynamic Response AnalysisMechanical Structure DesignStress AnalysisStructural MechanicsStructural VibrationVibration AnalysisFlexure HingesNanopositioningNanopositioning Systems
A novel 2-DOF nanopositioning stage drived by PZT is discribed in this paper.It is based on the dual-flexure-hinge structure.The numerical analysis on the dimensions' influence on the modal frequency、stress and the stiffness of the stage is carried out by using the parametric analysis.A new design method is declared in the paper in terms of the consistency of the theory,numerical and experimental analysis.