Plasma-enhanced atomic layer deposition of zinc phosphate - Concepedia

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Plasma-enhanced atomic layer deposition of zinc phosphate

21

Citations

33

References

2016

Year

Thomas Dobbelaere, Matthias M. Minjauw, Tauqeer Ahmad, Philippe M. Vereecken, Christophe Detavernier

Journal of Non-Crystalline Solids

Materials ScienceEngineeringSurface ScienceZinc PhosphateChemical DepositionChemical Vapor DepositionPlasma Processing

References

	Year	Citations

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