Concepedia

Publication | Closed Access

Thermal stability of amorphous tungsten/tungsten nitride synthesis using HFCVD as a diffusion barrier for copper

DOI

19

Citations

28

References

2016

Year

Somayeh Asgary, Mohammad Reza Hantehzadeh, M. Ghoranneviss, Arash Boochani
Applied Physics A

References

YearCitations

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