Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

Abstract

Here, we report a sapphire-based Fresnel zone plate (FZP), which is fabricated by femtosecond laser direct writing assisted with subsequent wet etching. With this method, we solved the problem of high surface roughness caused by ultrafast femtosecond laser processing. We have obtained ~12-nm average surface roughness smaller than 1/25 of the optical working wavelength. As-formed sapphire FZP also exhibited a well-defined geometry. More importantly, ultraviolet (UV) light focusing and imaging can be easily achieved. Due to the high material hardness, thermal and chemical stabilities of sapphire, such sapphire FZP, may have great potential in UV imaging and focusing under some harsh environments.