Heterogeneously Integrated InGaAs and Si Membrane Four-Color Photodetector Arrays

Abstract

We report the design and fabrication of heterogeneously integrated silicon and InGaAs membrane photodetector arrays. Visible and near-infrared (NIR) detection can be achieved by transfer printing a silicon membrane on InGaAs substrate. Based on the penetration-depth-dependent absorption of different wavelengths, filter-free visible color detection can be obtained via three-junction photocurrent measurement for silicon, and NIR can be detected by InGaAs. The measurements show good agreement with the optical behavior predicted by the design and simulation.