Concepedia

Publication | Closed Access

In Situ Measurements of Hydrogen Flux, Surface Coverage, Incorporation and Desorption During Magnetron Sputter-Deposition of A-SI:H.

DOI

13

Citations

9

References

1991

Year

John R. Abelson, N. Maley, James R. Doyle, G. F. Feng, Martin Fitzner, Monica Katiyar, L. Mandrell, Alan M. Myers, Ahmad Nuruddin, D. N. Ruzic,
MRS Proceedings

References

YearCitations

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