Publication | Closed Access
Effect of N2 flow rate on the properties of N doped TiO2 films deposited by DC coupled RF magnetron sputtering
26
Citations
26
References
2016
Year
Materials EngineeringMaterials ScienceEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsTio2 FilmsRf MagnetronN2 Flow RateThin FilmsThin Film Processing
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