Structural and mechanical properties of Nb1−xTixN thin films deposited by rf magnetron sputtering - Concepedia

Concepedia

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Structural and mechanical properties of Nb1−xTixN thin films deposited by rf magnetron sputtering

DOI Full Paper Access

14

Citations

55

References

2016

Year

A. Karimi, David Grange, N. Goebbels, A. Santana

Thin Solid Films

Materials EngineeringMaterials ScienceNb1−xtixn Thin FilmsMaterial AnalysisEngineeringPhysicsMechanical PropertiesApplied PhysicsRf MagnetronMagnetic Thin FilmsThin FilmsThin Film Processing

References

	Year	Citations

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