Publication | Open Access
Ti 2 AlN thin films synthesized by annealing of (Ti+Al)/AlN multilayers
31
Citations
33
References
2016
Year
Materials EngineeringMaterials ScienceAluminium NitrideTi 2EngineeringSurface ScienceApplied PhysicsThin FilmsLayered MaterialChemical Vapor DepositionAln Thin FilmsThin Film Processing
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