Monolithic integration of a suspended light-emitting diode with a Y-branch structure

Abstract

Abstract We describe a double-sided process for the monolithic integration of a light-emitting diode (LED) and a Y-branch structure on a GaN-on-silicon platform. The suspended LED and highly confined waveguides are fabricated by silicon removal with back-side thinning of the suspended membrane. When the LED is turned on, part of the light emission is confined by a suspended rectangular waveguide, and the light propagates laterally. The guided light is then coupled into two branching rectangular waveguides and diffracted into the air at the output facets. The light output can be tuned by the LED, opening the potential for more sophisticated integrated photonic circuits.