Publication | Closed Access

Half-Corbino short-channel amorphous In–Ga–Zn–O thin-film transistors with a-SiOx or a-SiOx/a-SiNx passivation layers

Electrical EngineeringEngineeringElectronic MaterialsApplied PhysicsSemiconductor MaterialThin Film Process TechnologyA-siox/a-sinx Passivation LayersThin FilmsAmorphous SolidThin Film ProcessingSemiconductor Device