Filter-less fluorescence sensor with high separation ability achieved by the suppression of forward-scattered light in silicon

Abstract

Abstract The improvement of a filter-less fluorescence sensor, by suppressing forward scattering in silicon by surface planarization is presented. A fluorescence microscope has been widely used in biochemical fields. However, it is difficult to miniaturize because optical filters and other parts are necessary. We previously developed a filter-less fluorescence sensor. The separation ability of excitation light and fluorescence in the previous device was 550:1. It is necessary to improve the separation ability. This study focuses on the suppression of forward-scattered incident light in silicon, through the enhanced surface planarization of polysilicon, which is the gate electrode material. The separation ability of the filter-less fluorescence sensor was increased from 550:1 to 1250:1 by the suppression of forward-scattered light.