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Effects of substrates, film thickness and temperature on thermal emittance of Mo/substrate deposited by magnetron sputtering

Materials EngineeringMaterials ScienceEngineeringNanoelectronicsFilm ThicknessOxide ElectronicsApplied PhysicsMagnetron SputteringThermal EmittanceSemiconductor Device FabricationThin FilmsElectronic PackagingMicroelectronicsChemical Vapor DepositionThin Film Processing