Design and Fabrication of Hybrid Metal Semiconductor Mirror for High-Power VECSEL

Abstract

The design, fabrication, and characterization of a hybrid metal-semiconductor distributed Bragg reflector (DBR) for optically pumped vertical external cavity surface emitting laser are reported. The realization of a pure gold reflector attached to an AlGaAs/AlAs DBR is achieved through the realization of a lithography pattern alternating gold and titanium areas for better surface adhesion. This reduces from 28 to 14, and the number of DBR pairs is needed to achieve a reflectivity above 99.9%. Experimental results are supported by simulations and show an output power beyond 4 W with an optical efficiency of 19% and very low thermal impedance, validating the excellent reflectivity and bonding quality of the device.