Publication | Closed Access
Residual stress in AlN films grown on sapphire substrates by molecular beam epitaxy
43
Citations
23
References
2016
Year
Materials ScienceAluminium NitrideEngineeringSurface ScienceApplied PhysicsAluminum Gallium NitrideResidual StressMolecular Beam EpitaxyEpitaxial GrowthAln Films
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