Towards nanogram per second Coriolis mass flow sensing

Abstract

We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50 μg s−1 at a maximum pressure drop of 1 bar with a zero stability of 14ng s−1 an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.