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Material removal mechanism in ultrasonic vibration assisted polishing of micro cylindrical surface on SiC

Materials ScienceEngineeringMaterial ProcessingMicrofabricationMechanical EngineeringMaterial Removal MechanismMicro Cylindrical SurfaceAcoustic CavitationUltrasonic VibrationUltrasoundSurface ProcessingMicrostructureMicromachined Ultrasonic Transducer