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Study of degradation in bulk lifetime of n-type silicon wafer due to oxidation of boron-rich layer

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringNanoelectronicsBoron-rich LayerBias Temperature InstabilityApplied PhysicsSemiconductor Device FabricationBulk LifetimeElectronic PackagingSilicon On InsulatorMicroelectronicsN-type Silicon WaferSemiconductor Device