Microsystem Technologies · 2016 · 18 citations · 13 references
Natural SciencesManufacturing EngineeringMaterials ScienceHeat TransferThermal AnalysisUltrasoundInternal Heat GenerationThermal ProcessingTransducer TechnologyUltrasonicsUltrasound InstrumentationUltrasound PhysicsEmbossingHeat GenerationHot Embossing
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Review on ultrasonic fabrication of polymer micro devices
Johannes Sackmann, Katharina Burlage, C. Gerhardy et al. · Ultrasonics · 2014 · 91 citations