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Dopant Segregation and Heat Treatment Effects on the Electrical Properties of Polycrystalline Silicon thin Films

Materials ScienceElectrical EngineeringEngineeringHeat Treatment EffectsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationDopant SegregationThin FilmsSilicon On InsulatorElectrical PropertiesThin Film Processing