2007 · 16 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionPhotocatalysisPhotoelectrochemical MaterialsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsPhotocatalytic MaterialsPhotocatalytic OxidationSemiconductor PhotocatalystsSolar PhotocatalysisTitanium Dioxide Photocatalysis
Abstract: TiO2 thin films were deposited on glass slides through PECVD with TTIP as a precursor and argon as a carrier gas; their photocatalytic characteristics were investigated. The films were amorphous when de-posited at low temperatures, but crystalline with anatase structures at temperatures higher than 300 oC. The film deposited at 400 oC and 5 W exhibited excellent adhesion to the substrate and the best photocatalytic activity. The photocatalytic activity was evaluated based on the degradation efficiency of MB and the bacter-icidal effect against E. coli under UV-A light. The concentration of MB reduced from 5.0 to 3.5 ppm in 3 h; 99 % of E. coli (2 × 105 CFU/mL) was killed in 1 h.