Concepedia

Publication | Open Access

Spatial metrology of dopants in silicon with exact lattice site precision

DOIFull Paper Access

54

Citations

43

References

2016

Year

Muhammad Usman, Juanita Bocquel, Joe Salfi, B. Voisin, Archana Tankasala, Rajib Rahman, M. Y. Simmons, Sven Rogge, Lloyd C. L. Hollenberg
Nature Nanotechnology

References

YearCitations

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