Concepedia

Publication | Closed Access

Optimizing HiPIMS pressure for deposition of high-k (k = 18.3) amorphous HfO2

DOI

20

Citations

34

References

2016

Year

Rajesh Ganesan, Billy J. Murdoch, J. G. Partridge, Stephen N. Bathgate, B Treverrow, Xiao Dong, A. Ross, Dougal G. McCulloch, David R. McKenzie, Marcela Bilek
Applied Surface Science

References

YearCitations

Page 1