Ge2Sb2Te5/Sb superlattice-like thin film for high speed phase change memory application

Abstract

In order to improve the operation speed of phase change memory (PCM), superlattice-like Ge2Sb2Te5/Sb (SLL GST/Sb) thin films were prepared in a sputtering method to explore the suitability as an active material for PCM application. Compared with GST, SLL GST/Sb thin film has a lower crystallization temperature, crystallization activation energy, thermal conductivity, and smaller crystalline grain size. A faster SET/RESET switching speed (10 ns) and a lower operation power consumption (the energy for RESET operation 9.1 × 10−13 J) are obtained. In addition, GST/Sb shows a good endurance of 8.3 × 104 cycles.