Guided-Mode Resonant $\hbox{HfO}_{2}$ Grating at Visible Wavelength Range

Abstract

Subwavelength <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\hbox{HfO}_{2}$</tex></formula> gratings are realized on a freestanding 200-nm-thick <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\hbox{HfO}_{2}$</tex></formula> membrane with air as the low refractive index materials on top and bottom. Strong coupling between the incident light and <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\hbox{HfO}_{2}$</tex></formula> grating is characterized by angular-resolved reflectivity measurement, and guided-mode resonances are experimentally demonstrated with the sensitivities to the parameters and shapes of grating and the polarization of incident beam. The experimental results are consistent with numerical simulation. This work opens the way to fabricate guided-mode resonant <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$ \hbox{HfO}_{2}$</tex></formula> photonic devices in the visible wavelength range.