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Fabrication, modeling and simulation of high sensitivity capacitive humidity sensors based on ZnO nanorods

Materials ScienceElectrical EngineeringZno NanorodsEngineeringSensorsNanomaterialsNanotechnologyHigh SensitivityHumidity SensorsApplied PhysicsNano Electro Mechanical SystemSensor DesignNanosensorHumidity SensorElectrochemical Gas Sensor