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Influence of magnetron sputtering deposition conditions and thermal treatment on properties of platinum thin films for positive electrode–electrolyte–negative electrode structure

Materials ScienceThermal TreatmentElectrical EngineeringEngineeringSurface ElectrochemistrySurface ScienceDeposition ConditionsThin Film Process TechnologyThin FilmsChemical DepositionPlatinum Thin FilmsThin Film ProcessingElectrochemistry