Concepedia

Publication | Closed Access

Sub-10nm resolution after lift-off using HSQ/PMMA double layer resist

DOI

42

Citations

5

References

2013

Year

Marcus Rommel, B. Nilsson, P. Jędrasik, Valentina Bonanni, Alexandre Dmitriev, J. Weis
Microelectronic Engineering

References

YearCitations

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