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Hydrogenated amorphous and crystalline SiC thin films grown by RF-PECVD and thermal MOCVD; comparative study of structural and optical properties

DOI

49

Citations

14

References

2003

Year

Chul-Woo Jung, Dong Chan Lim, Hongsub Jee, M.-G. Park, Su-Jin Ku, K.‐S. Yu, B. Hong, S.-B. Lee, Jin‐Hyo Boo
Surface and Coatings Technology

References

YearCitations

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