A miniature actuator with electromagnetic elements

Abstract

We propose a miniature actuator which can move in the x, y, and θ directions without guide rails. The proposed actuator consists of piezoelectric and electromagnetic elements. The structure of the actuator and the principle of its motion are described. Since the electromagnetic path of the proposed actuator does not have an air gap, the proposed actuator uses the electromagnetic flux effectively. The electromagnetic force is controlled to hold the actuator on a slope. The measured electromagnetic force is large enough for the actuator to be held on a slope. Small linear and rotational displacements are realized by deformations of the piezoelectric elements. The linear and rotational displacements were proportional to the applied voltage of the piezoelectric elements. Both micrometer-order linear step displacement and microradian-order rotational step displacement are realized. © 2001 Scripta Technica, Electr Eng Jpn, 134(4): 70–75, 2001