IEEE Photonics Technology Letters · 2010 · 77 citations · 4 references
EngineeringElectrical EngineeringMechanical EngineeringInstrumentationSensorsVibrationDisplacement MeasurementDisplacement SensorsInterferometryMechanical MeasurementMechanical SensorsVibration MeasurementDisplacement SensingDisplacement Sensor AccuracyMeasurement AccuracyMicrometer-scale Displacement MeasurementNanometer-scale Displacement MeasurementOptical Displacement SensorsReal-time Displacement MonitoringReal-time Sensor Systems
The disappearance of self-mixing fringes in the moderate feedback regime decreases the displacement measurement accuracy. The proposed method detects and compensates the fringe-loss, to limit the error to around 40 nm for micrometer range harmonic amplitude displacements. Moreover, it can also treat arbitrary displacements without any time-consuming optimization procedure and is suitable for implementation in a real-time displacement sensor.
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