Concepedia

Publication | Closed Access

Achieving high thermal conductivity from AlN films deposited by high-power impulse magnetron sputtering

DOI

36

Citations

21

References

2014

Year

K. Ait Aissa, Nadjib Semmar, Amine Achour, Quentin Simon, Agnès Petit, J. Camus, C. Boulmer-Leborgne, M. A. Djouadi
Journal of Physics D Applied Physics

Abstract

International audience

References

YearCitations

Page 1