The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc - Concepedia

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The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc

43

Citations

14

References

1999

Year

Erjia Liu, X. Shi, H.S. Tan, L.K. Cheah, Zhen Sun, Beng Kang Tay, J. Shi

Surface and Coatings Technology

Materials ScienceEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsSurface ScienceVacuum DeviceAmorphous SolidThin Film Processing

References

	Year	Citations

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