Nanoindentation and strain characteristics of nanostructured boride/nitride films

Abstract

The hardness, elastic modulus, and elastic recovery of nanostructured boride/nitride films 1–2 µm thick have been investigated by the nanoindentation technique under the maximum loads over a wide range (from 5 to 100 mN). It is demonstrated that only the hardness parameters remain constant at small loads (5–30 mN). The data obtained are discussed and compared with the parameters determined by other methods.