A 90nm CMOS integrated Nano-Photonics technology for 25Gbps WDM optical communications applications

Solomon Assefa, Steven M. Shank, William H. Green, Marwan Khater, E. Kiewra, Carol Reinholm, Swetha Kamlapurkar, Alexander Rylyakov, Clint L. Schow, Folkert Horst,

2012 · 159 citations · 2 references

Concepts

Abstract

The first sub-100nm technology that allows the monolithic integration of optical modulators and germanium photodetectors as features into a current 90nm base high-performance logic technology node is demonstrated. The resulting 90nm CMOS-integrated Nano-Photonics technology node is optimized for analog functionality to yield power-efficient single-die multichannel wavelength-mulitplexed 25Gbps transceivers.

References

2