Aspects of quantitative secondary ion mass spectrometry

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Natural Sciences, Physics, Atomic Physics +13

Developments in secondary ion mass spectroscopy and applications to surface studies

A. Benninghoven · Surface Science · 1975 · 454 citations

Natural Sciences, Chemistry, Materials Science +11

Energy density and time constant of heavy-ion-induced elastic-collision spikes in solids

Peter Sigmund · Applied Physics Letters · 1974 · 452 citations

Natural Sciences, Physics, Nuclear Physics +14

Thermodynamic approach to the quantitative interpretation of sputtered ion mass spectra

Charles A. Andersen, James Hinthorne · Analytical Chemistry · 1973 · 436 citations

Natural Sciences, Chemistry, Analytical Chemistry +9

Evaluation of a cesium positive ion source for secondary ion mass spectrometry

H. A. Storms, Kenneth F. Brown, John D. Stein · Analytical Chemistry · 1977 · 347 citations

Natural Sciences, Chemistry, Analytical Chemistry +11