IEEE Photonics Technology Letters · 2006 · 62 citations · 11 references
EngineeringElectrical EngineeringOptoelectronicsPhotonicsSemiconductor DevicesOptical InstrumentationOptical SensingOptoelectronic DevicesPhotodetectorsPhotonic Integrated CircuitsSilicon PhotonicsIntegrated PhotodetectorsOptical AbsorptionPhotoresponse CharacterizationSilicon PhotodetectorsSilicon PhotodiodesSilicon WaveguidesSilicon-on-insulator TechnologyWaveguide Photodetectors
We propose and demonstrate an in-line channel power monitor (ICPM) based on helium ion implanted silicon waveguides. The implanted waveguide can detect light at below-bandgap wavelengths (1440-1590 nm) which are normally not detectable by silicon. We study the enhanced photoresponse of helium ion implanted samples which were annealed at 200 degC, 300 degC, or 350 degC for different durations. Optical absorption and photodetector current measurements were performed for each sample. The ICPM can provide the same function as a waveguide tap coupler and a hybrid-integrated conventional photodiode
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0.1 dB/cm waveguide losses in single-mode SOI rib waveguides
U. Fischer, T. Zinke, J.‐R. Kropp et al. · IEEE Photonics Technology Letters · 1996 · 123 citations