A modular structure for a highly detailed model of semiconductor manufacturing

Abstract

A model of semiconductor manufacturing lines, using the discrete event simulation language, SIMAN, is described. A detailed, flexible, and generic model of this large, complex system was constructed by using a highly modular structure. A user interacts with the model through an interface which requires no programming and no recompiling even if major changes to the process sequence, number of resources (tools and operators), queue control, or number of job types are made.